Molecular and Cluster Ion Beams: Doping and Deposition with "Massive" Ions

This chapter describes the methods and applications for the use of multi-atom, ionized species, containing 10s to several thousand atoms, for high-flux ion doping and modification of surfaces with sub-keV energies per atom. “Massive” ion beams are formed using molecular species, liquids and gas clusters. Ion beam systems for such “massive” ions include the use of novel vaporizer methods, adiabatic cooling, electron beam ionization, and other techniques to provide stable, high-fluence beams. Applications include high-dose ion implantation for ultra-shallow junctions, room-temperature deposition of semiconductor and other layers, smoothing and high-rate etching of surfaces